Vacuum System - Service Parts
145 parts in the Siemens Healthineers Vacuum System - Service Parts assembly — OEM material numbers, descriptions and compatibility.
| Pos | Material No. | Description | Qty | FRU |
|---|---|---|---|---|
| 1 | 10576185 | Measuring board CP300T11 | 1 | — |
| 2 | 10576186 | Interface board IF300P | 1 | — |
| 7 | 10253548 | Measuring board PI300D | 1 | — |
| 3 | 10515277 | Pressure controller TPG 256A | 1 | — |
| 4 | 10842147 | TPG 500 Basic Unit | 1 | — |
| 5 | 10686183 | Display Control Unit DCU 100 | 1 | — |
| 5 | 10686184 | Display Control Unit DCU 200 | 1 | — |
| 5 | 10686185 | Display Control Unit DCU 300 | 1 | — |
| 6 | 10842018 | Handheld Programming Unit HPU 001 | 1 | — |
| 8 | 10841985 | DCU002 control unit for HiPace | 1 | — |
| 25 | 10577732 | Fast Gate Valve Unit | 1 | — |
| 26 | 10577731 | High vacuum sensor module | 1 | — |
| 27 | 10577729 | Control Module - Fast Gate Valve | 1 | — |
| 28 | 10577730 | Valve Module - Fast Gate Valve | 1 | — |
| |$17 | 10571542 | High Vacuum Sensor - CF-F40 | 1 | — |
| 10 | 10570671 | Copper seal DN40 CF | 1 | — |
| 11 | 10576169 | Cu seal DN 63 CF PF 501 406-T | 1 | — |
| 12 | 10570656 | Copper seal DN100 CF | 1 | — |
| 13 | 10570657 | Copper seal DN 150/160 CF | 1 | — |
| 14 | 10570658 | Copper Seal DN200 CF | 1 | — |
| 15 | 10570659 | Copper seal DN250 CF | 1 | — |
| 16 | 10190192 | Clamping ring DN10-16KF | 1 | — |
| 17 | 10190193 | Clamping ring DN20-25KF | 1 | — |
| 18 | 10572140 | Centering ring DN16KF | 1 | — |
| 19 | 10572141 | Centering ring DN25KF | 1 | — |
| 20 | 10594250 | Gasket ISO-KF DN 10-16 | 1 | — |
| 21 | 10576940 | Gasket CF130 | 1 | — |
| 22 | 10685566 | PSU SITOP Compact, 24 VDC 1.3A | 1 | — |
| 23 | 10593556 | PROFIBUS-DP Repeater | 1 | — |
| |$35 | 10576187 | Multiple Pump Controller | 1 | — |
| |$36 | 10576197 | Controller - Remote TSP/NEG | 1 | — |
| |$37 | 10576170 | Ambient Shield for TSP | 1 | — |
| 34 | 10570697 | Ion pump CV300T | 1 | — |
| |$40 | 10576187 | Multiple Pump Controller | 1 | — |
| 36 | 10570699 | Splitterbox | 1 | — |
| |$43 | 10576182 | Ion pump controller MPC | 1 | — |
| 38 | 10576196 | Residual Gas Analyzer | 1 | — |
| |$46 | 10842149 | Residual Gas Analyzer PrismaPro | 1 | — |
| |$48 | 10572148 | Mains cable 230VAC | 1 | — |
| 40 | 10190189 | Screw-in flan.DN16 ISO-KF/G1/4"inc. | 1 | — |
| 41 | 10570698 | Vacuum forepump MVP 015-2 | 1 | — |
| 43 | 10253525 | Diaphragm pump MVP070-3 | 1 | — |
| |$53 | 10253529 | Relay box 100-240V/20 A | 1 | — |
| |$54 | 10253532 | Cable for backing pump relay box | 1 | — |
| 46A | 10515287 | MVP 160-3, forepump | 1 | — |
| 46B | 10842143 | Hi-Scroll 12 | 1 | — |
| 47 | 10686797 | Booster pump ACP28 SD, DN25 | 1 | — |
| 48 | 10842076 | Booster pump ACP15 SD, DN25 | 1 | — |
| 50 | 10842093 | HPT 200 PB Fullrange vacuum gauge | 1 | — |
| 51 | 10190206 | Pirani pressure gauge TPR018 CF | 1 | — |
| 52 | 10190187 | Pirani pressure gauge TPR018 KF | 1 | — |
| 53 | 10190212 | Cold cathode gauge IKR070 DN40 CF | 1 | — |
| 54 | 10570700 | Profibus converter - TIC 252 | 1 | — |
| 55 | 10515278 | Pressure gauge PKR251 DN25 ISO-KF | 1 | — |
| 56 | 10842095 | HPT 200 PB power supply adapter M12 | 1 | — |
| 57 | 10842094 | HPT 200 PB Profibus adapter | 1 | — |
| 60 | 10684934 | Service Cart Unit with RGA | 1 | — |
| 61 | 10649350 | Vacuum service cart | 1 | — |
| 70 | 10577226 | Turbo pump drive unit TCP350 | 1 | — |
| 79 | 10842032 | Turbo pump HiPace 80 DN63 KF | 1 | — |
| 78 | 10842047 | Air cooling for HiPace80 | 1 | — |
| 83 | 10253503 | Turbo pump HiPace300 | 1 | — |
| 88 | 10593533 | Turbo Pump HIPace 300W | 1 | — |
| 82 | 10253501 | Turbo pump HiPace700 | 1 | — |
| 72 | 10253506 | Venting valve TVF005 G1/8" | 1 | — |
| 73 | 10572145 | Splinter screen for turbo pumps | 1 | — |
| 75 | 10572151 | Air cooling kit - Turbo Pumps | 1 | — |
| 76 | 10571154 | Relay Box 5A PM 041 937-T | 1 | — |
| |$84 | 10572150 | Water Cooling - Turbo Pumps | 1 | — |
| 84 | 10253505 | Splinter screen turbo pump DN100 CF | 1 | — |
| 85 | 10253512 | Air cooling for HiPace400/700 | 1 | — |
| 86 | 10593535 | Air cooling for HiPace300 | 1 | — |
| |$88 | 10577219 | Cable relay box to TCP350, | 1 | — |
| |$89 | 10576756 | Profibus Gateway | 1 | — |
| 91 | 10650845 | Vibration damper - turbo pump DN100 | 1 | — |
| 92 | 10686929 | Vacuum tube with 2x DN 160 CF-F | 1 | — |
| 93 | 10576193 | Hose - Flexible Vacuum, L = 1,5m | 1 | — |
| |$94 | 10842137 | Bellow Hose DN 160 CF 500 mm | 1 | — |
| |$95 | 10190190 | T-piece DN40CF | 1 | — |
| |$96 | 10190191 | Reducing piece DN25-16KF | 1 | — |
| |$97 | 10253593 | Flexible hose DN25KF, 2000 mm | 1 | — |
| |$98 | 10190188 | Reduc. T-piece steel DN25-16 ISO-KF | 1 | — |
| |$99 | 10190185 | Adapter piece DN16 KF-DN40 CF | 1 | — |
| |$100 | 10253527 | Screw-in flange DN16KF-G1/4" | 1 | — |
| |$101 | 10253573 | Cross piece DN40CF | 1 | — |
| |$102 | 10253602 | Metallic hose DN16KF 250 mm | 1 | — |
| |$103 | 10253601 | Metallic hose DN16KF 500 mm | 1 | — |
| |$104 | 10572149 | Metallic hose DN16KF 1000mm | 1 | — |
| |$105 | 10253598 | Metallic hose DN16KF 2000 mm | 1 | — |
| |$106 | 10253609 | Poral filter centering ring DN16KF | 1 | — |
| |$107 | 10253592 | Blank flange DN16KF | 1 | — |
| |$108 | 10576160 | Hose Vacuum DN25 ISO-KF L=1000 | 1 | — |
| |$109 | 10572146 | Hose DN25 ISO-KF - L = 500 | 1 | — |
| |$110 | 10571505 | T-piece DN16KF | 1 | — |
| |$111 | 10570693 | Flange CF-F 40 - Blank | 1 | — |
| |$112 | 10570682 | Flange CF-F100 - Blank 304L | 1 | — |
| |$113 | 10570688 | Flange CF-F150 - Blank 304L | 1 | — |
| |$114 | 10570692 | Flange CF-F200 - Blank | 1 | — |
| |$115 | 10571399 | Beam exit foil window | 1 | — |
| |$116 | 10592881 | Vacuum Pipe Square L = 868 - Cerami | 1 | — |
| |$117 | 10592880 | Vacuum Pipe L = 804 - Ceramic | 1 | — |
| |$118 | 10570793 | Vacuum Pipe L = 806 - Ceramic | 1 | — |
| |$119 | 10571454 | Vacuum Pipe L = 1494 - Ceramic | 1 | — |
| |$121 | 10570592 | Bellow CF100/CF150/ø 88,9 L= 85 | 1 | — |
| |$122 | 10570677 | Bellow CF100/CF100/ø 88,9 L= 85 | 1 | — |
| |$123 | 10570678 | Bellow CF100/CF200/ø 88,9 L=85 | 1 | — |
| |$124 | 10570681 | Bellow CF-R200/CF150/ø150 L=85 | 1 | — |
| |$125 | 10571354 | Bellow CF-F150/CF-R150/ø139 L=233 | 1 | — |
| |$126 | 10571363 | Bellow CF150 L = 152,4 | 1 | — |
| |$127 | 10571930 | Bellow CF130/CF100/ø88,9 L=85 | 1 | — |
| |$128 | 10572002 | Bellow CF200/CF250/ø174 L= 63 | 1 | — |
| |$129 | 10577048 | Bellow CF-R200/CF-F200/L120,5 | 1 | — |
| |$130 | 10593066 | Bellow CF100/CF200/ø88,9 L=104,8 | 1 | — |
| |$131 | 10593247 | Bellow CF200/CF200/ø160 L=142 | 1 | — |
| |$132 | 10650120 | Bellow CF-R100/CF-F100/ø88,9 L=85 | 1 | — |
| |$133 | 10576969 | Bellow CF200/CF200/ø150 L=180 | 1 | — |
| |$134 | 10570039 | Bellow CF100/100/ID88,9 L=75 | 1 | — |
| |$135 | 10576938 | Bellow CF100 - Hydroformed | 1 | — |
| |$136 | 10570680 | Bellow CF-F250/CF-R250/ø250 L=200 | 1 | — |
| |$137 | 10650554 | Bellow CF-F100/CF-R100/ø90 L=85 | 1 | — |
| |$138 | 10593378 | Bellow CF250/Plate L= 44 | 1 | — |
| |$139 | 10593372 | Bellow CF250/Plate L= 56 | 1 | — |
| |$140 | 10593371 | Bellow CFR150/CF150/ø110 L= 98 | 1 | — |
| |$141 | 10593305 | Bellow CF200/CF200 L= 83,5 | 1 | — |
| |$142 | 10593067 | Bellow CF100/CF150/ø88,9 L=65 | 1 | — |
| |$143 | 10593065 | Bellow CF100/CF200/ø88,9 L=161,7 | 1 | — |
| |$144 | 10576871 | Bellow CF100/CF200/ø 88,9 L=85 | 1 | — |
| |$145 | 10570679 | Bellow CF150/CF100/ø102 L= 65,5 | 1 | — |
| |$146 | 10570652 | Bellow CF150/CF150/ø88,9 L=126 | 1 | — |
| |$148 | 10253494 | Gate valve VAT48244-CE74 | 1 | — |
| |$149 | 10190209 | Gate valve VAT48240-CE74 | 1 | — |
| |$150 | 10190186 | UHV 040-CU all-metal angle valve CF | 1 | — |
| |$151 | 10190184 | Safety valve TVV001 | 1 | — |
| |$152 | 10190301 | AVC016 SA, manual valve DN16 KF | 1 | — |
| |$153 | 10190184 | Safety valve TVV001 | 1 | — |
| |$154 | 10650713 | Gate Valve - Pneumatic DN160 | 1 | — |
| |$155 | 10570676 | Angle Valve DN160 | 1 | — |
| |$156 | 10572174 | Gate Valve CF200 | 1 | — |
| |$157 | 10576166 | Gate Valve - Pneumatic DN100 | 1 | — |
| |$158 | 10842146 | Manual gas dosing valve | 1 | — |
| |$159 | 10593451 | Section fast closing valve | 1 | — |
| 100 | 10842078 | TurboPump control unit TPS310 | 1 | — |
| |$162 | 10683121 | Push-in hose nipple adapter | 1 | — |
| |$163 | 10683052 | HiPace Y-Connector M12 | 1 | — |
| |$164 | 10841982 | HLT550 with MVP160 on mobile cart | 1 | — |
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- Service manuals for the system this part belongs to — removal, installation and calibration procedures.
- Error codes with meaning, severity and the subsystem that reports them.