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Vacuum System - Service Parts

146 parts in the Siemens Healthineers Vacuum System - Service Parts assembly — OEM material numbers, descriptions and compatibility.

PosMaterial No.DescriptionQtyFRU
110576185Measuring board CP300T111
210576186Interface board IF300P1
710253548Measuring board PI300D1
310515277Pressure controller TPG 256A1
410842147TPG 500 Basic Unit1
510686183Display Control Unit DCU 1001
510686184Display Control Unit DCU 2001
510686185Display Control Unit DCU 3001
610842018Handheld Programming Unit HPU 0011
810841985DCU002 control unit for HiPace1
2510577732Fast Gate Valve Unit1
2610577731High vacuum sensor module1
2710577729Control Module - Fast Gate Valve1
2810577730Valve Module - Fast Gate Valve1
|$1710571542High Vacuum Sensor - CF-F401
1010570671Copper seal DN40 CF1
1110576169Cu seal DN 63 CF PF 501 406-T1
1210570656Copper seal DN100 CF1
1310570657Copper seal DN 150/160 CF1
1410570658Copper Seal DN200 CF1
1510570659Copper seal DN250 CF1
1610190192Clamping ring DN10-16KF1
1710190193Clamping ring DN20-25KF1
1810572140Centering ring DN16KF1
1910572141Centering ring DN25KF1
2010594250Gasket ISO-KF DN 10-161
2110576940Gasket CF1301
2210685566PSU SITOP Compact, 24 VDC 1.3A1
2310593556PROFIBUS-DP Repeater1
|$3510576187Multiple Pump Controller1
|$3610576197Controller - Remote TSP/NEG1
|$3710576170Ambient Shield for TSP1
3410570697Ion pump CV300T1
|$4010576187Multiple Pump Controller1
3610570699Splitterbox1
|$4310576182Ion pump controller MPC1
3810576196Residual Gas Analyzer1
|$4610842149Residual Gas Analyzer PrismaPro1
|$4810572148Mains cable 230VAC1
4010190189Screw-in flan.DN16 ISO-KF/G1/4"inc.1
4110570698Vacuum forepump MVP 015-21
4310253525Diaphragm pump MVP070-31
|$5310253529Relay box 100-240V/20 A1
|$5410253532Cable for backing pump relay box1
46A10515287MVP 160-3, forepump1
46B10842143Hi-Scroll 121
4710686797Booster pump ACP28 SD, DN251
4810842076Booster pump ACP15 SD, DN251
5010842093HPT 200 PB Fullrange vacuum gauge1
5110190206Pirani pressure gauge TPR018 CF1
5210190187Pirani pressure gauge TPR018 KF1
5310190212Cold cathode gauge IKR070 DN40 CF1
5410570700Profibus converter - TIC 2521
5510515278Pressure gauge PKR251 DN25 ISO-KF1
5610842095HPT 200 PB power supply adapter M121
5710842094HPT 200 PB Profibus adapter1
6010684934Service Cart Unit with RGA1
6110649350Vacuum service cart1
7010577226Turbo pump drive unit TCP3501
7910842032Turbo pump HiPace 80 DN63 KF1
7810842047Air cooling for HiPace801
8310253503Turbo pump HiPace3001
8810593533Turbo Pump HIPace 300W1
8210253501Turbo pump HiPace7001
7210253506Venting valve TVF005 G1/8"1
7310572145Splinter screen for turbo pumps1
7510572151Air cooling kit - Turbo Pumps1
7610571154Relay Box 5A PM 041 937-T1
|$8410572150Water Cooling - Turbo Pumps1
8410253505Splinter screen turbo pump DN100 CF1
8510253512Air cooling for HiPace400/7001
8610593535Air cooling for HiPace3001
|$8810577219Cable relay box to TCP350,1
|$8910576756Profibus Gateway1
9110650845Vibration damper - turbo pump DN1001
9310576193Hose - Flexible Vacuum, L = 1,5m1
|$9310190190T-piece DN40CF1
|$9410190191Reducing piece DN25-16KF1
|$9510253593Flexible hose DN25KF, 2000 mm1
|$9610190188Reduc. T-piece steel DN25-16 ISO-KF1
|$9710190185Adapter piece DN16 KF-DN40 CF1
|$9810253527Screw-in flange DN16KF-G1/4"1
|$9910253573Cross piece DN40CF1
|$10010253602Metallic hose DN16KF 250 mm1
|$10110253601Metallic hose DN16KF 500 mm1
|$10210572149Metallic hose DN16KF 1000mm1
|$10310253598Metallic hose DN16KF 2000 mm1
|$10410253609Poral filter centering ring DN16KF1
|$10510253592Blank flange DN16KF1
|$10610576160Hose Vacuum DN25 ISO-KF L=10001
|$10710572146Hose DN25 ISO-KF - L = 5001
|$10810571505T-piece DN16KF1
|$10910570693Flange CF-F 40 - Blank1
|$11010570682Flange CF-F100 - Blank 304L1
|$11110570688Flange CF-F150 - Blank 304L1
|$11210570692Flange CF-F200 - Blank1
|$11310571392Flange CF-F250 - Blank1
|$11410571399Beam exit foil window1
|$11510592881Vacuum Pipe Square L = 868 - Cerami1
|$11610592880Vacuum Pipe L = 804 - Ceramic1
|$11710570793Vacuum Pipe L = 806 - Ceramic1
|$11810571454Vacuum Pipe L = 1494 - Ceramic1
|$12010570592Bellow CF100/CF150/ø 88,9 L= 851
|$12110570677Bellow CF100/CF100/ø 88,9 L= 851
|$12210570678Bellow CF100/CF200/ø 88,9 L=851
|$12310570681Bellow CF-R200/CF150/ø150 L=851
|$12410571354Bellow CF-F150/CF-R150/ø139 L=2331
|$12510571363Bellow CF150 L = 152,41
|$12610571930Bellow CF130/CF100/ø88,9 L=851
|$12710572002Bellow CF200/CF250/ø174 L= 631
|$12810577048Bellow CF-R200/CF-F200/L120,51
|$12910593066Bellow CF100/CF200/ø88,9 L=104,81
|$13010593247Bellow CF200/CF200/ø160 L=1421
|$13110650120Bellow CF-R100/CF-F100/ø88,9 L=851
|$13210576969Bellow CF200/CF200/ø150 L=1801
|$13310570039Bellow CF100/100/ID88,9 L=751
|$13410576938Bellow CF100 - Hydroformed1
|$13510570680Bellow CF-F250/CF-R250/ø250 L=2001
|$13610650554Bellow CF-F100/CF-R100/ø90 L=851
|$13710593378Bellow CF250/Plate L= 441
|$13810593372Bellow CF250/Plate L= 561
|$13910593371Bellow CFR150/CF150/ø110 L= 981
|$14010593305Bellow CF200/CF200 L= 83,51
|$14110593067Bellow CF100/CF150/ø88,9 L=651
|$14210593065Bellow CF100/CF200/ø88,9 L=161,71
|$14310576871Bellow CF100/CF200/ø 88,9 L=851
|$14410570679Bellow CF150/CF100/ø102 L= 65,51
|$14510570652Bellow CF150/CF150/ø88,9 L=1261
|$14710253494Gate valve VAT48244-CE741
|$14810190209Gate valve VAT48240-CE741
|$14910190186UHV 040-CU all-metal angle valve CF1
|$15010190184Safety valve TVV0011
|$15110190301AVC016 SA, manual valve DN16 KF1
|$15210190184Safety valve TVV0011
|$15310650713Gate Valve - Pneumatic DN1601
|$15410570676Angle Valve DN1601
|$15510572174Gate Valve CF2001
|$15610576166Gate Valve - Pneumatic DN1001
|$15710842146Manual gas dosing valve1
10010842078TurboPump control unit TPS3101
|$16010683121Push-in hose nipple adapter1
|$16110683052HiPace Y-Connector M121
|$16210514779TMU 261 P1
|$16310514784Adapter TCP350 - TMP 19-pole1
|$16410514785Adapter accessories M12 - RJ451
|$16510841982HLT550 with MVP160 on mobile cart1

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